溶胶-凝胶法制备平板玻璃减反射膜的工艺研究

Study on the Preparation of Flat Glass with Antireflective Coatings by Sol-Gel Process

关键词:  制备条件  平板玻璃  溶胶-凝胶法  镀膜玻璃  工艺研究  组成  减反射膜  SiO2薄膜  椭圆偏振  陈化时间

Key words:  sol-gel,SiO_2 antireflective coating,flat glass

摘要:

应用溶胶-凝胶法技术在普通的平板玻璃上制备了具有减反射效果的SiO2薄膜，着重讨论了溶胶的组成及陈化时间对镀膜玻璃减反射性能的影响；应用原子力显微镜、激光椭圆偏振仪和分光光度仪等测定和分析了镀膜平板玻璃的特性．结果表明：膜层的增透效果与制备条件存在着一定的内在规律。

Abstract:

The preparation of silica antireflective coatings through sol-gel process is discussed, involving the composition of coating solution and ageing time, and then the optimal condition of the sol for preparation of antireflective coatings is given. The films are characterized with AFM, spectrophotometer and ellipsometer respectively. The experimental results show that there is a relationship between the antireflective effect and the preparation conditions.